FORM 4
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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(Print or Type Responses)
1. Name and Address of Reporting Person *
URBANEK LIDA
   2. Issuer Name and Ticker or Trading Symbol
KLA TENCOR CORP [klac] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
__X__ Director _____ 10% Owner
_____ Officer (give title below) _____ Other (specify below)
(Last)
(First)
(Middle)
C/O KLA TENCOR, 160 RIO ROBLES		 3. Date of Earliest Transaction (Month/Day/Year)
08/06/2003
(Street)

SAN JOSE, CA 95134		 4. If Amendment, Date Original Filed(Month/Day/Year)
08/06/2003		 6. Individual or Joint/Group Filing(Check Applicable Line)
_X_ Form filed by One Reporting Person
___ Form filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V Amount (A) or (D) Price
Common Stock 08/06/2003   S   700 D $ 50.71 0 (1) I Urbanek Family Foundation
Common Stock 08/06/2003   S   300 D $ 50.63 30,924 I Urbanek Family Foundation
Common Stock               1,271,414 I By Trust

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.
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Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned Following Reported Transaction(s)
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
Code V (A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Qualified Stock Option $ 12.50             06/16/1996 05/13/2006 Common Stock 5,280   5,280 D  
Non-Qualified Stock Option $ 13.44             07/22/1999 07/22/2008 Common Stock 5,000   5,000 D  
Non-Qualified Stock Option $ 17.59             11/17/1998 11/17/2008 Common Stock 6,666   6,666 D  
Non-Qualified Stock Option $ 17.78             06/15/1995 05/15/2005 Common Stock 1,946   1,946 D  
Non-Qualified Stock Option $ 26.25             11/10/2000 11/10/2010 Common Stock 10,000   10,000 D  
Non-Qualified Stock Option $ 29             07/22/1998 07/22/2007 Common Stock 5,000   5,000 D  
Non-Qualified Stock Option $ 37.05             11/08/2002 11/08/2012 Common Stock 10,000   10,000 D  
Non-Qualified Stock Option $ 46.28             11/16/1999 11/16/2009 Common Stock 10,000   10,000 D  
Non-Qualified Stock Option $ 47.23             11/09/2001 11/09/2011 Common Stock 10,000   10,000 D  

Reporting Owners

Reporting Owner Name / Address Relationships
 Director  10% Owner  Officer  Other
URBANEK LIDA
C/O KLA TENCOR
160 RIO ROBLES
SAN JOSE, CA 95134		   X      

Signatures

 Lida Urbanek   08/13/2003
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Amount of securities in Family Foundation beneficially owned following all reported transactions is 30,924. This total is indicated on following transaction line.

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