FORM 5
Check this box if no longer subject to Section 16. Form 4 or Form 5 obligations may continue. See Instruction 1(b).
Form 3 Holdings Reported
Form 4 Transactions Reported
UNITED STATES SECURITIES AND EXCHANGE COMMISSION
Washington, D.C. 20549

ANNUAL STATEMENT OF CHANGES IN BENEFICIAL OWNERSHIP OF SECURITIES

Filed pursuant to Section 16(a) of the Securities Exchange Act of 1934 or Section 30(h) of the Investment Company Act of 1940
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1. Name and Address of Reporting Person *
COHEN AVI
 2. Issuer Name and Ticker or Trading Symbol
KLA TENCOR CORP [klac] 		5. Relationship of Reporting Person(s) to Issuer
(Check all applicable)
_____ Director _____ 10% Owner
__X__ Officer (give title below) _____ Other (specify below)
VP, Pattern Solutions Group
(Last)
(First)
(Middle)

160 RIO KOBLES		 3. Statement for Issuer's Fiscal Year Ended (Month/Day/Year)
06/30/2006
(Street)


SAN JOSE, CA 95130		 4. If Amendment, Date Original Filed(Month/Day/Year)
 6. Individual or Joint/Group Reporting
(check applicable line)

_X_ Form Filed by One Reporting Person
___ Form Filed by More than One Reporting Person
(City)
(State)
(Zip)
Table I - Non-Derivative Securities Acquired, Disposed of, or Beneficially Owned
1.Title of Security
(Instr. 3)		 2. Transaction Date (Month/Day/Year) 2A. Deemed Execution Date, if any (Month/Day/Year) 3. Transaction Code
(Instr. 8)		 4. Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4 and 5)		 5. Amount of Securities Beneficially Owned at end of Issuer's Fiscal Year
(Instr. 3 and 4)		 6. Ownership Form: Direct (D) or Indirect (I)
(Instr. 4)		 7. Nature of Indirect Beneficial Ownership
(Instr. 4)
Amount (A) or (D) Price
Common Stock             3,196 (1) D  
Common Stock - Restricted Stock Units             33,333 D  

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly. Persons who respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB control number. SEC 2270 (9-02)

Table II - Derivative Securities Acquired, Disposed of, or Beneficially Owned
(e.g., puts, calls, warrants, options, convertible securities)
1. Title of Derivative Security
(Instr. 3)		 2. Conversion or Exercise Price of Derivative Security 3. Transaction Date (Month/Day/Year) 3A. Deemed Execution Date, if any (Month/Day/Year) 4. Transaction Code
(Instr. 8)		 5. Number of Derivative Securities Acquired (A) or Disposed of (D)
(Instr. 3, 4, and 5)		 6. Date Exercisable and Expiration Date
(Month/Day/Year)		 7. Title and Amount of Underlying Securities
(Instr. 3 and 4)		 8. Price of Derivative Security
(Instr. 5)		 9. Number of Derivative Securities Beneficially Owned at End of Issuer's Fiscal Year
(Instr. 4)		 10. Ownership Form of Derivative Security: Direct (D) or Indirect (I)
(Instr. 4)		 11. Nature of Indirect Beneficial Ownership
(Instr. 4)
(A) (D) Date Exercisable Expiration Date Title Amount or Number of Shares
Non-Qualified Stock Option $ 26.25           11/10/2001 11/10/2010 Common Stock
8,750
  8,750
D
 
Non-Qualified Stock Option $ 29.31           10/02/2002 10/02/2011 Common Stock
22,500
  22,500
D
 
Non-Qualified Stock Option $ 32.75           04/04/2002 04/04/2011 Common Stock
8,750
  8,750
D
 
Non-Qualified Stock Option $ 33.75           10/27/2000 10/27/2009 Common Stock
24,000
  24,000
D
 
Non-Qualified Stock Option $ 34.67           11/08/2003 01/28/2013 Common Stock
12,500
  12,500
D
 
Non-Qualified Stock Option $ 37.05           11/08/2003 11/08/2012 Common Stock
6,250
  6,250
D
 
Non-Qualified Stock Option $ 40.66           10/27/2004 08/02/2014 Common Stock
6,000
  6,000
D
 
Non-Qualified Stock Option $ 41.79           09/21/2005 09/21/2014 Common Stock
75,000
  75,000
D
 
Non-Qualified Stock Option $ 44.6875           08/13/2001 08/13/2010 Common Stock
17,500
  17,500
D
 
Non-Qualified Stock Option $ 45.16           10/27/2004 04/26/2014 Common Stock
10,000
  10,000
D
 
Non-Qualified Stock Option $ 47.95           09/26/2006 09/26/2012 Common Stock
75,000
  75,000
D
 
Non-Qualified Stock Option $ 51.229           11/08/2003 07/30/2013 Common Stock
6,250
  6,250
D
 
Non-Qualified Stock Option $ 53.86           10/27/2004 10/27/2013 Common Stock
16,000
  16,000
D
 
Non-Qualified Stock Option $ 58.10           10/27/2004 01/27/2014 Common Stock
8,000
  8,000
D
 

Reporting Owners

Reporting Owner Name / Address Relationships
Director 10% Owner Officer Other
COHEN AVI
160 RIO KOBLES
SAN JOSE, CA 95130		       VP, Pattern Solutions Group  

Signatures

Avi Cohen 08/11/2006
**Signature of Reporting Person Date

Explanation of Responses:

* If the form is filed by more than one reporting person, see Instruction 4(b)(v).
** Intentional misstatements or omissions of facts constitute Federal Criminal Violations. See 18 U.S.C. 1001 and 15 U.S.C. 78ff(a).
(1) Includes 574 shares purchased through the Employee Stock Purchase Plan during the fiscal year.
 
Remarks:
Voluntary filing of form to show holdings as of 6/30/2006.  No longer subject to Section 16 effective 8/3/2006.

Note: File three copies of this Form, one of which must be manually signed. If space provided is insufficient, see Instruction 6 for procedure.

Potential persons who are to respond to the collection of information contained in this form are not required to respond unless the form displays a currently valid OMB number.