Exhibit 21.1
KLA-Tencor Corporation
List of Subsidiaries as of June 30, 2012
 
Name
 
State or Other Jurisdiction of
Incorporation / Organization
 
DOMESTIC SUBSIDIARIES
 
 
International Sales & Business, Inc.
 
California
KLA-Tencor China Corporation
 
California
KLA-Tencor International Corporation
 
California
VLSI Standards, Inc.
 
California
ADE International Corporation
 
Delaware
Belize Holdings, LLC
 
Delaware
KLA-Tencor Asia-Pac Distribution Corporation
 
Delaware
KT Venture Group, L.L.C.
 
Delaware
KT Venture Group II, L.L.C.
 
Delaware
 
 
 
INTERNATIONAL SUBSIDIARIES
 
 
ICOS Vision Systems Corporation NV
 
Belgium
ICOS Vision Systems NV
 
Belgium
Lee Ta Technologies (BVI), Inc.
 
British Virgin Islands
KLA-Tencor Corporation (Cayman) Limited, I
 
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, II
 
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III
 
Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, IV
 
Cayman Islands
ICOS Vision Systems (Shenzhen) Co. Ltd.
 
China
KLA-Tencor International Trading (Shanghai) Co., Ltd.
 
China
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.
 
China
Vistec Semiconductor Systems (Shanghai) Co., Ltd.
 
China
KLA-Tencor France SARL
 
France
KLA-Tencor GmbH
 
Germany
KLA-Tencor MIE GmbH
 
Germany
KLA-Tencor MIE Holdings GmbH & Co. KG
 
Germany
KLA-Tencor MIE Holdings Verwaltungs GmbH
 
Germany
KLA-Tencor MIE Jena GmbH
 
Germany
ICOS Vision Systems Ltd.
 
Hong Kong
KLA-Tencor Software India Private Limited
 
India
KLA-Tencor Ireland Ltd.
 
Ireland
Optical Metrology Patents Limited
 
Ireland
KLA-Tencor Corporation (Israel)
 
Israel
KLA-Tencor Corporation Holding (1987) Ltd.
 
Israel
KLA-Tencor Corporation (1992) Ltd.
 
Israel
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.
 
Israel
KLA-Tencor Italy S.R.L.
 
Italy
KLA-Tencor Japan, Ltd.
 
Japan
KLA-Tencor Korea, Inc.
 
Korea
KLA-Tencor MIE Holdings S.à r.l.
 
Luxembourg
KLA-Tencor (Malaysia) Sdn Bhd
 
Malaysia






Name
 
State or Other Jurisdiction of
Incorporation / Organization
 
KLA-Tencor (Singapore) Pte. Ltd.
 
Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd.
 
Singapore
KLA Instruments S.A.
 
Switzerland
KLA-Tencor Yield Management Software Taiwan Corporation
 
Taiwan
KLA-Tencor (Thailand) Limited
 
Thailand
KLA-Tencor Limited
 
United Kingdom
KLA-Tencor (Service) Limited
 
United Kingdom