Exhibit 21.1
KLA Corporation
List of Subsidiaries as of June 30, 2024
NameState or Other Jurisdiction of
Incorporation / Organization 
DOMESTIC SUBSIDIARIES 
Anchor Semiconductor, Inc. California
Belize Holdings, LLC Delaware
Dino Acquisition Technology L.L.C. Delaware
ECI Technology International, Inc. Delaware
Filmetrics, Inc.  California
Front Edge Technology Inc.California
International Sales & Business, Inc. California
KLA Aleris Holding, LLC Delaware
KLA EUVMI, LLCDelaware
KLA-Tencor Asia-Pac Distribution Corporation Delaware
KLA-Tencor China Corporation California
KLA-Tencor International Corporation California
KT Recreation Association, LLC Delaware
KT Venture Group II, L.L.C. Delaware
KT Venture Group, L.L.C. Delaware
KT Venture Management, L.L.C.Delaware
Nanomechanics Inc. Tennessee
Orbotech LT Solar, LLC Delaware
VLSI Standards, Inc. California
Whiskey Holding Sub, LLC Delaware
Zeta Instruments, Inc. Delaware
INTERNATIONAL SUBSIDIARIES  
Anchor (Shanghai) Semiconductor Inc. Shanghai
Capres A/S Denmark
Frontline P.C.B. Solutions Ltd. Israel
ICOS Vision Systems (Shenzhen) Co. Ltd. China
ICOS Vision Systems Corporation BV Belgium
ICOS Vision Systems Ltd. Hong Kong
ICOS Vision Systems NV Belgium
InnerSense Israel
KLA Finco Pte. Ltd.Singapore
KLA-Tencor (Malaysia) Sdn Bhd Malaysia
KLA-Tencor (Singapore) Pte. Ltd. Singapore
KLA-Tencor (Thailand) Limited Thailand
KLA-Tencor Corporation (1992) Ltd. Israel
KLA-Tencor Corporation (Cayman) Limited, I Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III Cayman Islands
KLA-Tencor Corporation (Israel) Israel
KLA-Tencor Corporation Holding (1987) Ltd. Israel
KLA-Tencor France SARL France
KLA-Tencor GmbH Germany
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. Israel
KLA-Tencor International Trading (Shanghai) Co., Ltd. China
KLA-Tencor Ireland Ltd. Ireland




NameState or Other Jurisdiction of
Incorporation / Organization
KLA-Tencor Italy S.R.L. Italy
KLA-Tencor Japan, Ltd. Japan
KLA-Tencor Korea, Inc. Korea
KLA-Tencor Limited United Kingdom
KLA-Tencor MIE GmbH Germany
KLA-Tencor MIE Holdings GmbH & Co. KG Germany
KLA-Tencor MIE Holdings S.à r.l. Luxembourg
KLA-Tencor MIE Holdings Verwaltungs GmbH Germany
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. China
KLA-Tencor Singapore Holding Co. Pte II Ltd. Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd. Singapore
KLA-Tencor Software India Private Limited India
Lakers Holding Company APS Denmark
Laser Imaging Systems GmbH Germany
Lee Ta Technologies (BVI), Inc. British Virgin Islands
New System SRL Italy
Ofek Technologies Israel
Orbotech Asia Ltd Hong Kong
Orbotech B.V. Netherlands
Orbotech Electronics (Shenzhen) Co., Ltd China
Orbotech Electronics (Suzhou) Co Ltd China
Orbotech Holding GmbH Germany
Orbotech Korea Ltd Korea
Orbotech Ltd Israel
Orbotech Pacific Ltd. Hong Kong
Orbotech S.A. Belgium
Orbotech Technology Ventures Ltd. Israel
Orbotech Trading (Shanghai) Co., Ltd China
Qoniac Gmbh Germany
SPTS Technologies Limited UK
SPTS Technologies Overseas Holdings Ltd. UK
SPTS Technologies UK Limited UK