Exhibit 21.1
KLA Corporation
List of Subsidiaries as of June 30, 2025
NameState or Other Jurisdiction of
Incorporation / Organization 
DOMESTIC SUBSIDIARIES 
Anchor Semiconductor, Inc. California
Belize Holdings, LLC Delaware
Dino Acquisition Technology L.L.C. Delaware
ECI Technology International, Inc. Delaware
Front Edge Technology Inc. California
International Sales & Business, Inc.California
KLA Aleris Holding, LLC Delaware
KLA EUVMI, LLC Delaware
KLA-Tencor Asia-Pac Distribution CorporationDelaware
KLA-Tencor China Corporation California
KLA-Tencor International Corporation California
KT Recreation Association, LLC Delaware
KT Venture Group II, L.L.C. Delaware
KT Venture Group, L.L.C. Delaware
KT Venture Management, L.L.C. Delaware
Nanomechanics Inc.Tennessee
Orbotech LT Solar, LLC Delaware
VLSI Standards, Inc. California
Whiskey Holding Sub, LLC Delaware
Zeta Instruments, Inc. Delaware
INTERNATIONAL SUBSIDIARIES 
Anchor (Shanghai) Semiconductor Inc. Shanghai
Capres A/S Denmark
Frontline P.C.B. Solutions Ltd. Israel
ICOS Vision Systems (Shenzhen) Co. Ltd. China
ICOS Vision Systems Corporation Belgium
ICOS Vision Systems Ltd. Hong Kong
ICOS Vision Systems NV Belgium
KLA Corporation UK Ltd United Kingdom
KLA Corporation UK Holdings Ltd United Kingdom
KLA Finco Pte. Ltd.Singapore
KLA-Tencor (Malaysia) Sdn Bhd Malaysia
KLA-Tencor (Singapore) Pte. Ltd. Singapore
KLA-Tencor (Thailand) Limited Thailand
KLA-Tencor Corporation (1992) Ltd. Israel
KLA-Tencor Corporation (Cayman) Limited, I Cayman Islands
KLA-Tencor Corporation (Cayman) Limited, III Cayman Islands
KLA-Tencor Corporation (Israel) Israel
KLA-Tencor Corporation Holding (1987) Ltd. Israel
KLA-Tencor France SARL France
KLA-Tencor GmbH Germany
KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. Israel
KLA-Tencor International Trading (Shanghai) Co., Ltd. China
KLA-Tencor Ireland Ltd. Ireland




KLA-Tencor Italy S.R.L.Italy
KLA-Tencor Japan, Ltd.Japan
KLA-Tencor Korea, Inc.Korea
KLA-Tencor MIE GmbHGermany
KLA-Tencor MIE Holdings GmbH & Co. KGGermany
KLA-Tencor MIE Holdings S.à r.l.Luxembourg
KLA-Tencor MIE Holdings Verwaltungs GmbHGermany
KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.China
KLA-Tencor Singapore Holding Co. Pte II Ltd.Singapore
KLA-Tencor Singapore Holding Co. Pte. Ltd.Singapore
KLA-Tencor Software India Private LimitedIndia
Lakers Holding Company APSDenmark
Laser Imaging Systems GmbHGermany
Lee Ta Technologies (BVI), Inc.British Virgin Islands
New System SRLItaly
Orbotech Asia LtdHong Kong
Orbotech B.V.Netherlands
Orbotech Electronics (Shenzhen) Co., LtdChina
Orbotech Electronics (Suzhou) Co LtdChina
Orbotech Holding GmbHGermany
Orbotech Korea LtdKorea
Orbotech LtdIsrael
Orbotech Pacific Ltd.Hong Kong
Orbotech NVBelgium
Orbotech Technology Ventures Ltd.Israel
Orbotech Trading (Shanghai) Co., LtdChina