EXHIBIT 99(b)
CONSENT OF RBC CAPITAL MARKETS CORPORATION
We hereby consent to the inclusion in the registration statement on Form S-4 of KLA-Tencor
Corporation, a Delaware corporation (KLA-Tencor), relating to the proposed merger of South
Acquisition Corporation, a Delaware corporation and wholly owned subsidiary of KLA-Tencor, with and
into ADE Corporation, a Massachusetts corporation (the Registration Statement), of our opinion
letter, dated February 21, 2006, appearing as Annex B to the proxy statement/prospectus which is a
part of the Registration Statement, and to the references of our firms name therein.
In giving such consent, we do not thereby admit that we come within the category of person
whose consent is required under Section 7 or Section 11 of the Securities Act of 1933, as amended,
or the rules and regulations adopted by the Securities and Exchange Commission thereunder, nor do
we admit that we are experts with respect to any part of such Registration Statement within the
meaning of the term experts as used in the Securities Act of 1933, as amended, or the rules and
regulations of the Securities and Exchange Commission thereunder.
Very truly yours,
By: /s/ RBC Capital Markets Corporation
New York, New York
March 17, 2006