EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS





                                  EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

   We hereby consent to the incorporation by reference in the Registration
Statements on Form S-8 (Nos. 33-15784, 2-71584, 2-75314 , 33-26002, 33-42973,
33-42982, 33-42975 and 33-55362) of KLA Instruments Corporation of our report
dated July 26, 1994, appearing on page 24 of the 1994 Annual Report to
Stockholders which is incorporated in this Annual Report on Form 10-K.  We also
consent to the incorporation by reference of our report on the Financial
Statement Schedules, which appears on page 20 of this Form 10-K.





Price Waterhouse LLP

San Jose, California
September 27, 1994