EXHIBIT 99.3 CONSENT OF PERSON ABOUT TO BECOME A DIRECTOR I, Lida Urbanek, hereby consent to the use, in the Registration Statement on Form S-4 of KLA Instruments Corporation (the "Company") to which this consent is filed as an exhibit and the Joint Proxy Statement/Prospectus included therein, of my name as a person about to become a director of the Company. /s/ Lida Urbanek ------------------------ Lida Urbanek March 10, 1997 CONSENT OF PERSON ABOUT TO BECOME A DIRECTOR I, Jon D. Tompkins, hereby consent to the use, in the Registration Statement on Form S-4 of KLA Instruments Corporation (the "Company") to which this consent is filed as an exhibit and the Joint Proxy Statement/Prospectus included therein, of my name as a person about to become a director of the Company. /s/ Jon D. Tompkins ----------------------- Jon D. Tompkins March 10, 1997 CONSENT OF PERSON ABOUT TO BECOME A DIRECTOR I, Dean O. Morton, hereby consent to the use, in the Registration Statement on Form S-4 of KLA Instruments Corporation (the "Company") to which this consent is filed as an exhibit and the Joint Proxy Statement/Prospectus included therein, of my name as a person about to become a director of the Company. /s/ Dean O. Morton ------------------------ Dean O. Morton March 10, 1997 CONSENT OF PERSON ABOUT TO BECOME A DIRECTOR I, Richard J. Elkus, Jr., hereby consent to the use, in the Registration Statement on Form S-4 of KLA Instruments Corporation (the "Company") to which this consent is filed as an exhibit and the Joint Proxy Statement/Prospectus included therein, of my name as a person about to become a director of the Company. /s/ Richard J. Elkus, Jr. ------------------------ Richard J. Elkus, Jr. March 10, 1997 CONSENT OF PERSON ABOUT TO BECOME A DIRECTOR I, James W. Bagley, hereby consent to the use, in the Registration Statement on Form S-4 of KLA Instruments Corporation (the "Company") to which this consent is filed as an exhibit and the Joint Proxy Statement/Prospectus included therein, of my name as a person about to become a director of the Company. /s/ James W. Bagley ------------------------ James W. Bagley March 10, 1997