EXHIBIT 23.1
CONSENT
OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM
We hereby consent to the incorporation by reference in this Registration Statement on Form S-8
of our report dated September 2, 2005, relating to the financial
statements, financial statement schedule, management’s assessment of
the effectiveness of internal control over financial reporting and
the effectiveness of internal control over financial reporting, of KLA-Tencor
Corporation, which appears in KLA-Tencor Corporation’s Annual Report on Form 10-K for the year
ended June 30, 2005.
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PricewaterhouseCoopers,
LLP
San Jose, California
November 18, 2005