EXHIBIT 23.1

                       CONSENT OF INDEPENDENT ACCOUNTANTS

We hereby consent to the incorporation by reference in this Registration
Statement on Form S-8 of our report dated July 24, 2000, except as to Note 9
which is as of August 15, 2000, relating to the financial statements of
KLA-Tencor Corporation, which appears in KLA-Tencor Corporation's Annual Report
on Form 10-K for the year ended June 30, 2000. We also consent to the
incorporation by reference of our report dated July 24, 2000 relating to the
financial statement schedule, which appears in such Annual Report on Form 10-K.


/s/ PricewaterhouseCoopers LLP

PricewaterhouseCoopers LLP
San Jose, California
November 9, 2000