EXHIBIT 21.1
KLA-Tencor Subsidiaries
State or Other Jurisdiction of
Name Incorporation
DOMESTIC SUBSIDIARIES
International Sales & Business, Inc. California
KLA-Tencor Building Corporation California
KLA-Tencor DISC Corporation California
KLA-Tencor International Corporation California
KLA-Tencor Klinnik Corporation California
KLA-Tencor Technologies Corporation California
KLA-Tencor (Thailand Branch) Corporation California
VLSI Standards, Inc. California
Finle Technologies, Inc. Texas
INTERNATIONAL SUBSIDIARIES
KLA-Tencor (Cayman) Limited I Cayman Islands
KLA-Tencor (Cayman) Limited II Cayman Islands
KLA-Tencor (Cayman) Limited III Cayman Islands
KLA-Tencor (Cayman) Limited IV Cayman Islands
KLA-Tencor (Israel) Corporation Israel
KLA-Tencor Holding Corporation 1987 Limited Israel
KLA-Tencor Corporation 1992 Limited Israel
KLA-Tencor Italy S.R.L. Italy
KLA-Tencor Japan, Ltd. Japan
Phase Metrics Japan Co., Inc. Japan
KLA-Tencor Foreign Sales Corporation Barbados
KLA-Tencor GmbH Germany
KLA-Tencor France SARL France
KLA-Tencor Korea, Inc. Korea
Phase Metrics Korea Co., Ltd. Korea
KLA-Tencor Limited United Kingdom
KLA-Tencor (Malaysia) Sdn Bhd Malaysia
Phase Metrics Malaysia, Sdn, Bhd Malaysia
KLA-Tencor (Singapore) PTE, Ltd. Singapore
Phase Metrics Pacific PTE, Ltd. Singapore
KLA-Tencor (Service) Limited United Kingdom
VLSI Standards, KK Japan
KLA-Tencor International Trading (Shanghai) Co. Ltd. China
KLA-Tencor Microelectronics Equipment (Tianjin) Co., LTD China
KLA Instruments Switzerland, S.A. Switzerland
Nanopro GmbH Germany
Yield Analysis Software Technologies, Ins. Taiwan
Lee Ta Technologies (BVI), Inc. British Virgin Islands
Phase Metrics Thailand Co., Ltd. Thailand