Exhibit 21.1

KLA-Tencor Corporation

List of Subsidiaries

 

Name

   State or Other Jurisdiction of
Incorporation

DOMESTIC SUBSIDIARIES

  

Phase Shift Technology, Inc.

   Arizona

Blue 29 Corporation

   California

International Sales & Business, Inc.

   California

KLA-Tencor Building Corporation

   California

KLA-Tencor China Corporation

   California

KLA-Tencor DISC Corporation

   California

KLA-Tencor International Corporation

   California

KLA-Tencor Instruments Klinnik Corporation

   California

KLA-Tencor Technologies Corporation

   California

SensArray Corporation

   California

Sensys Instruments Corporation

   California

Therma-Wave Domestic International Sales Corporation

   California

VLSI Standards, Inc.

   California

ADE International Corporation

   Delaware

FabSolve, LLC

   Delaware

KLA-Tencor Asia-Pac Distribution Corporation

   Delaware

OnWafer Technologies, Inc.

   Delaware

Therma-Wave, Inc.

   Delaware

ADE Corporation

   Massachusetts

ADE Optical Systems Corporation

   Massachusetts

ADE Securities Corp.

   Massachusetts

ADE Software Corporation

   Massachusetts

ADE Technologies, Inc.

   Massachusetts

INTERNATIONAL SUBSIDIARIES

  

ATI Foreign Sales Corporation

   Barbados

Lee Ta Technologies (BVI), Inc.

   British Virgin Islands

KLA-Tencor Corporation (Cayman) Limited, I

   Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, II

   Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, III

   Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, IV

   Cayman Islands

KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.

   China

Therma-Wave (Shanghai) Co., Ltd

   China

KLA-Tencor France SARL

   France

ADE International GmbH

   Germany

KLA-Tencor GmbH

   Germany

KLA-Tencor Software India Private Limited

   India

KLA-Tencor Ireland Ltd.

   Ireland

KLA-Tencor Corporation (Israel)

   Israel

KLA-Tencor Holding (1987) Ltd.

   Israel

KLA-Tencor Corporation (1992) Ltd.

   Israel

KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.

   Israel

KLA-Tencor Italy S.R.L.

   Italy

Japan ADE, Ltd.

   Japan

KLA-Tencor Japan, Ltd.

   Japan

SensArray Japan Corporation

   Japan


Name

   State or Other Jurisdiction of
Incorporation

INTERNATIONAL SUBSIDIARIES (continued)

  

Therma-Wave (Japan), K.K.

   Japan

VLSI Standards, K.K.

   Japan

KLA-Tencor Korea, Inc.

   Korea

KLA-Tencor (Malaysia) Sdn Bhd

   Malaysia

KLA-Tencor (Singapore) PTE, Ltd.

   Singapore

KLA-Tencor Singapore Holding Co. PTE. Ltd.

   Singapore

KLA Instruments S.A.

   Switzerland

KLA-Tencor Yield Management Software Taiwan Corporation

   Taiwan

KLA-Tencor (Thailand) Ltd.

   Thailand

KLA-Tencor Limited

   United Kingdom

KLA-Tencor (Service) Limited

   United Kingdom

Therma-Wave, Ltd.

   United Kingdom