Exhibit 21.1
KLA-Tencor Corporation
List of Subsidiaries
| Name |
State or Other Jurisdiction of Incorporation | |
| DOMESTIC SUBSIDIARIES |
||
| Phase Shift Technology, Inc. |
Arizona | |
| Blue 29 Corporation |
California | |
| International Sales & Business, Inc. |
California | |
| KLA-Tencor Building Corporation |
California | |
| KLA-Tencor China Corporation |
California | |
| KLA-Tencor DISC Corporation |
California | |
| KLA-Tencor International Corporation |
California | |
| KLA-Tencor Instruments Klinnik Corporation |
California | |
| KLA-Tencor Technologies Corporation |
California | |
| SensArray Corporation |
California | |
| Sensys Instruments Corporation |
California | |
| Therma-Wave Domestic International Sales Corporation |
California | |
| VLSI Standards, Inc. |
California | |
| ADE International Corporation |
Delaware | |
| FabSolve, LLC |
Delaware | |
| KLA-Tencor Asia-Pac Distribution Corporation |
Delaware | |
| OnWafer Technologies, Inc. |
Delaware | |
| Therma-Wave, Inc. |
Delaware | |
| ADE Corporation |
Massachusetts | |
| ADE Optical Systems Corporation |
Massachusetts | |
| ADE Securities Corp. |
Massachusetts | |
| ADE Software Corporation |
Massachusetts | |
| ADE Technologies, Inc. |
Massachusetts | |
| INTERNATIONAL SUBSIDIARIES |
||
| ATI Foreign Sales Corporation |
Barbados | |
| Lee Ta Technologies (BVI), Inc. |
British Virgin Islands | |
| KLA-Tencor Corporation (Cayman) Limited, I |
Cayman Islands | |
| KLA-Tencor Corporation (Cayman) Limited, II |
Cayman Islands | |
| KLA-Tencor Corporation (Cayman) Limited, III |
Cayman Islands | |
| KLA-Tencor Corporation (Cayman) Limited, IV |
Cayman Islands | |
| KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd. |
China | |
| Therma-Wave (Shanghai) Co., Ltd |
China | |
| KLA-Tencor France SARL |
France | |
| ADE International GmbH |
Germany | |
| KLA-Tencor GmbH |
Germany | |
| KLA-Tencor Software India Private Limited |
India | |
| KLA-Tencor Ireland Ltd. |
Ireland | |
| KLA-Tencor Corporation (Israel) |
Israel | |
| KLA-Tencor Holding (1987) Ltd. |
Israel | |
| KLA-Tencor Corporation (1992) Ltd. |
Israel | |
| KLA-Tencor Integrated Metrology (Israel) (2002) Ltd. |
Israel | |
| KLA-Tencor Italy S.R.L. |
Italy | |
| Japan ADE, Ltd. |
Japan | |
| KLA-Tencor Japan, Ltd. |
Japan | |
| SensArray Japan Corporation |
Japan | |
| Name |
State or Other Jurisdiction of Incorporation | |
| INTERNATIONAL SUBSIDIARIES (continued) |
||
| Therma-Wave (Japan), K.K. |
Japan | |
| VLSI Standards, K.K. |
Japan | |
| KLA-Tencor Korea, Inc. |
Korea | |
| KLA-Tencor (Malaysia) Sdn Bhd |
Malaysia | |
| KLA-Tencor (Singapore) PTE, Ltd. |
Singapore | |
| KLA-Tencor Singapore Holding Co. PTE. Ltd. |
Singapore | |
| KLA Instruments S.A. |
Switzerland | |
| KLA-Tencor Yield Management Software Taiwan Corporation |
Taiwan | |
| KLA-Tencor (Thailand) Ltd. |
Thailand | |
| KLA-Tencor Limited |
United Kingdom | |
| KLA-Tencor (Service) Limited |
United Kingdom | |
| Therma-Wave, Ltd. |
United Kingdom |