Exhibit 21.1

KLA-Tencor Subsidiaries

Name

 

State or Other Jurisdiction of Incorporation


 


DOMESTIC SUBSIDIARIES

 

 

International Sales & Business, Inc.

 

California

KLA-Tencor Building Corporation

 

California

KLA-Tencor DISC Corporation

 

California

KLA-Tencor International Corporation

 

California

KLA-Tencor Klinnik Corporation

 

California

KLA-Tencor Technologies Corporation

 

California

KLA-Tencor China Corporation

 

California

KLA-Tencor Asia-Pac Distribution Corporation

 

Delaware

VLSI Standards, Inc.

 

California

 

 

 

INTERNATIONAL SUBSIDIARIES

 

 

KLA-Tencor Corporation (Cayman) Limited, I

 

Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, II

 

Cayman Islands

KLA-Tencor Corporation (Cayman) Limited, III

 

Cayman Islands

KLA-Tencor (Cayman) Limited IV

 

Cayman Islands

KLA-Tencor Corporation (Israel) Ltd.

 

Israel

KLA-Tencor Holding Limited

 

Israel

KLA-Tencor Corporation 1992 Ltd.

 

Israel

KLA-Tencor Integrated Metrology (Israel) (2002) Ltd.

 

Israel

KLA-Tencor Italy S.R.L.

 

Italy

KLA-Tencor Japan, Ltd.

 

Japan

VLSI Standards, K.K.

 

Japan

KLA-Tencor GmbH

 

Germany

KLA-Tencor France SARL

 

France

KLA-Tencor Korea, Inc.

 

Korea

KLA-Tencor Limited

 

United Kingdom

KLA-Tencor (Services) Limited

 

United Kingdom

KLA-Tencor (Malaysia) Sdn Bhd

 

Malaysia

KLA-Tencor (Singapore) PTE, Ltd.

 

Singapore

KLA-Tencor International Trading (Shanghai) Co., Ltd.

 

China

KLA-Tencor Microelectronics Equipment (Tianjin) Co., Ltd.

 

China

KLA-Tencor Semiconductor Equipment Technology (Shanghai) Co., Ltd.

 

China

KLA Instruments S.A.

 

Switzerland

Yield Analysis Software Technologies, Inc.

 

Taiwan

Lee Ta Technologies (BVI), Inc.

 

British Virgin Islands

KLA-Tencor (Thailand) Ltd.

 

Thailand

KLA-Tencor Software India Private Limited

 

India