| Goodwill and Purchased Intangible Assets  - Schedule of Goodwill (Details) $ in Thousands | 6 Months Ended | |||||||
|---|---|---|---|---|---|---|---|---|
| Dec. 31, 2015  USD ($)  reporting_unit | ||||||||
| Goodwill | ||||||||
| Number of reporting units | reporting_unit | 4 | |||||||
| Goodwill | ||||||||
| Balance as of June 30, 2015 | $ 335,263 | |||||||
| Goodwill allocation | 0 | |||||||
| Goodwill adjustment | (58) | |||||||
| Balance as of December 31, 2015 | 335,205 | |||||||
| Wafer Inspection | ||||||||
| Goodwill | ||||||||
| Balance as of June 30, 2015 | 332,783 | [1] | ||||||
| Goodwill allocation | (51,671) | [2] | ||||||
| Goodwill adjustment | (58) | |||||||
| Balance as of December 31, 2015 | 281,054 | |||||||
| Patterning | ||||||||
| Goodwill | ||||||||
| Balance as of June 30, 2015 | 2,480 | [3] | ||||||
| Goodwill allocation | 50,775 | [2] | ||||||
| Goodwill adjustment | 0 | |||||||
| Balance as of December 31, 2015 | 53,255 | |||||||
| Others | ||||||||
| Goodwill | ||||||||
| Balance as of June 30, 2015 | 0 | |||||||
| Goodwill allocation | 896 | [2] | ||||||
| Goodwill adjustment | 0 | |||||||
| Balance as of December 31, 2015 | $ 896 | |||||||
| 
 | ||||||||
| X | ||||||||||
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- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available. 
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| X | ||||||||||
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- Definition A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period. No definition available. 
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| X | ||||||||||
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- Definition Amount of transfers of an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized among segments. No definition available. 
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| X | ||||||||||
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- Definition Amount of increase (decrease) from foreign currency translation adjustments and purchase accounting adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Number of reporting units tested for impairment of goodwill. A reporting unit is an operating segment or one level below an operating segment. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Details 
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- Details 
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