| Segment Reporting and Geographic Information  - Revenue from External Customers by Products and Services (Details) - USD ($) $ in Thousands | 3 Months Ended | 6 Months Ended | |||||
|---|---|---|---|---|---|---|---|
| Dec. 31, 2015 | Dec. 31, 2014 | Dec. 31, 2015 | Dec. 31, 2014 | ||||
| Revenue from External Customer | |||||||
| Revenues | $ 710,245 | $ 676,357 | $ 1,352,889 | $ 1,319,258 | |||
| Segment percent of total revenues | 100.00% | 100.00% | 100.00% | 100.00% | |||
| Wafer Inspection | |||||||
| Revenue from External Customer | |||||||
| Revenues | $ 275,825 | $ 323,050 | $ 503,608 | $ 617,532 | |||
| Segment percent of total revenues | 39.00% | 48.00% | 37.00% | 47.00% | |||
| Patterning | |||||||
| Revenue from External Customer | |||||||
| Revenues | $ 206,549 | $ 131,309 | $ 404,634 | $ 284,207 | |||
| Segment percent of total revenues | 29.00% | 19.00% | 30.00% | 22.00% | |||
| Global Service and Support | |||||||
| Revenue from External Customer | |||||||
| Revenues | [1] | $ 211,048 | $ 194,324 | $ 410,919 | $ 366,282 | ||
| Segment percent of total revenues | [1] | 30.00% | 29.00% | 30.00% | 28.00% | ||
| Other | |||||||
| Revenue from External Customer | |||||||
| Revenues | $ 16,823 | $ 27,674 | $ 33,728 | $ 51,237 | |||
| Segment percent of total revenues | 2.00% | 4.00% | 3.00% | 3.00% | |||
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- Definition Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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