Annual report pursuant to Section 13 and 15(d)

Description of Business and Summary of Significant Accounting Policies - Terminated Merger Agreement (Details)

v3.7.0.1
Description of Business and Summary of Significant Accounting Policies - Terminated Merger Agreement (Details)
Oct. 05, 2016
USD ($)
KLA-Tencor Lam Research Merger  
Business Acquisition  
Termination fee $ 0