| Goodwill and Purchased Intangible Assets  - Schedule of Goodwill (Details) $ in Thousands | 12 Months Ended | ||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|
| Jun. 30, 2017  USD ($)  reporting_unit | Jun. 30, 2016  USD ($) | Jun. 30, 2014  USD ($) | |||||||||
| Goodwill | |||||||||||
| Number of reporting units | reporting_unit | 4 | ||||||||||
| Goodwill | |||||||||||
| Goodwill, beginning balance | $ 335,177 | $ 335,263 | |||||||||
| Goodwill reallocation | 0 | ||||||||||
| Acquired goodwill | 14,280 | ||||||||||
| Foreign currency adjustment | 69 | (86) | |||||||||
| Goodwill, ending balance | 349,526 | 335,177 | |||||||||
| Accumulated impairment loss | $ 277,600 | ||||||||||
| Wafer Inspection | |||||||||||
| Goodwill | |||||||||||
| Goodwill, beginning balance | 281,026 | 332,783 | [1] | ||||||||
| Goodwill reallocation | [2] | (51,671) | |||||||||
| Acquired goodwill | 0 | ||||||||||
| Foreign currency adjustment | 69 | (86) | |||||||||
| Goodwill, ending balance | 281,095 | 281,026 | |||||||||
| Patterning | |||||||||||
| Goodwill | |||||||||||
| Goodwill, beginning balance | 53,255 | 2,480 | [3] | ||||||||
| Goodwill reallocation | [2] | 50,775 | |||||||||
| Acquired goodwill | 0 | ||||||||||
| Foreign currency adjustment | 0 | 0 | |||||||||
| Goodwill, ending balance | 53,255 | 53,255 | |||||||||
| GSS | |||||||||||
| Goodwill | |||||||||||
| Goodwill, beginning balance | 0 | 0 | |||||||||
| Goodwill reallocation | 0 | ||||||||||
| Acquired goodwill | 2,856 | ||||||||||
| Foreign currency adjustment | 0 | 0 | |||||||||
| Goodwill, ending balance | 2,856 | 0 | |||||||||
| Others | |||||||||||
| Goodwill | |||||||||||
| Goodwill, beginning balance | 896 | 0 | |||||||||
| Goodwill reallocation | [2] | 896 | |||||||||
| Acquired goodwill | 11,424 | ||||||||||
| Foreign currency adjustment | 0 | 0 | |||||||||
| Goodwill, ending balance | $ 12,320 | $ 896 | |||||||||
| 
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| X | ||||||||||
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- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Amount of accumulated impairment loss for an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available. 
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- Definition A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period. No definition available. 
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| X | ||||||||||
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- Definition Amount of transfers into (out of) an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Amount of increase (decrease) from foreign currency translation adjustments and purchase accounting adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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| X | ||||||||||
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- Definition Number of reporting units tested for impairment of goodwill. A reporting unit is an operating segment or one level below an operating segment. No definition available. 
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| X | ||||||||||
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- Details 
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