| Segment Reporting and Geographic Information  - Revenue from External Customers by Products and Services (Details) - USD ($) $ in Thousands | 3 Months Ended | 12 Months Ended | ||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Jun. 30, 2017 | Mar. 31, 2017 | Dec. 31, 2016 | Sep. 30, 2016 | Jun. 30, 2016 | Mar. 31, 2016 | Dec. 31, 2015 | Sep. 30, 2015 | Jun. 30, 2017 | Jun. 30, 2016 | Jun. 30, 2015 | ||||
| Revenue from External Customer | ||||||||||||||
| Revenues | $ 938,647 | $ 913,809 | $ 876,885 | $ 750,673 | $ 919,171 | $ 712,433 | $ 710,245 | $ 642,644 | $ 3,480,014 | $ 2,984,493 | $ 2,814,049 | |||
| Segment percent of total revenues | 100.00% | 100.00% | 100.00% | |||||||||||
| Wafer Inspection | ||||||||||||||
| Revenue from External Customer | ||||||||||||||
| Revenues | $ 1,601,190 | $ 1,293,922 | $ 1,224,858 | |||||||||||
| Segment percent of total revenues | 46.00% | 43.00% | 44.00% | |||||||||||
| Patterning | ||||||||||||||
| Revenue from External Customer | ||||||||||||||
| Revenues | $ 917,178 | $ 772,045 | $ 736,959 | |||||||||||
| Segment percent of total revenues | 26.00% | 26.00% | 26.00% | |||||||||||
| Global Service and Support | ||||||||||||||
| Revenue from External Customer | ||||||||||||||
| Revenues | [1] | $ 897,794 | $ 852,151 | $ 790,971 | ||||||||||
| Segment percent of total revenues | [1] | 26.00% | 29.00% | 28.00% | ||||||||||
| Other | ||||||||||||||
| Revenue from External Customer | ||||||||||||||
| Revenues | $ 63,852 | $ 66,375 | $ 61,261 | |||||||||||
| Segment percent of total revenues | 2.00% | 2.00% | 2.00% | |||||||||||
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- Definition Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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