Quarterly report pursuant to Section 13 or 15(d)

BUSINESS COMBINATIONS (Details)

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BUSINESS COMBINATIONS (Details) - USD ($)
3 Months Ended
Apr. 24, 2020
Aug. 22, 2019
Dec. 31, 2020
Business Acquisition      
Estimated additional consideration     $ 0
April 2020 acquisition      
Business Acquisition      
Total purchase consideration $ 11,400,000    
Acquired goodwill $ 2,200,000    
August 2019 acquisition      
Business Acquisition      
Total purchase consideration   $ 94,000,000.0  
Additional consideration (up to)   $ 60,000,000.0  
August 2019 acquisition | Wafer Inspection and Patterning      
Business Acquisition      
Acquired goodwill     54,200,000
Other Acquisitions      
Business Acquisition      
Contingent consideration liability, non-current     $ 7,200,000