Annual report pursuant to Section 13 and 15(d)

GOODWILL AND PURCHASED INTANGIBLE ASSETS - Schedule of Goodwill (Details)

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GOODWILL AND PURCHASED INTANGIBLE ASSETS - Schedule of Goodwill (Details) - USD ($)
 3 Months Ended 12 Months Ended
Mar. 31, 2020
Jun. 30, 2021
Jun. 30, 2020
Jun. 30, 2019
Goodwill [Roll Forward]        
Goodwill, beginning balance   $ 2,045,402,000 $ 2,211,858,000  
Acquired goodwill     56,180,000  
Goodwill adjustments     34,134,000  
Goodwill impairment   0 (256,649,000) $ 0
Goodwill, disposal from sale of business   (34,250,000)    
Foreign currency adjustment   20,000 (121,000)  
Goodwill, ending balance   2,011,172,000 2,045,402,000 2,211,858,000
Goodwill   2,011,172,000 2,045,402,000 2,211,858,000
Wafer Inspection and Patterning Reporting Unit        
Goodwill [Roll Forward]        
Goodwill, beginning balance   416,840,000 360,615,000  
Acquired goodwill     56,180,000  
Goodwill adjustments     166,000  
Goodwill impairment     0  
Goodwill, disposal from sale of business   0    
Foreign currency adjustment   20,000 (121,000)  
Goodwill, ending balance   416,860,000 416,840,000 360,615,000
Goodwill   416,860,000 416,840,000 360,615,000
Global Service and Support (“GSS”)        
Goodwill [Roll Forward]        
Goodwill, beginning balance   25,908,000 25,908,000  
Acquired goodwill     0  
Goodwill adjustments     0  
Goodwill impairment     0  
Goodwill, disposal from sale of business   0    
Foreign currency adjustment   0 0  
Goodwill, ending balance   25,908,000 25,908,000 25,908,000
Goodwill   25,908,000 25,908,000 25,908,000
Specialty Semiconductor Process        
Goodwill [Roll Forward]        
Goodwill, beginning balance   681,858,000 821,842,000  
Acquired goodwill     0  
Goodwill adjustments     4,195,000  
Goodwill impairment $ (144,200,000)   (144,179,000)  
Goodwill, disposal from sale of business   0    
Foreign currency adjustment   0 0  
Goodwill, ending balance   681,858,000 681,858,000 821,842,000
Goodwill   681,858,000 681,858,000 821,842,000
PCB and Display        
Goodwill [Roll Forward]        
Goodwill, beginning balance   907,221,000 989,918,000  
Acquired goodwill     0  
Goodwill adjustments     29,773,000  
Goodwill impairment $ (112,500,000)   (112,470,000)  
Goodwill, disposal from sale of business   (34,250,000)    
Foreign currency adjustment   0 0  
Goodwill, ending balance   872,971,000 907,221,000 989,918,000
Goodwill   872,971,000 907,221,000 989,918,000
Component Inspection        
Goodwill [Roll Forward]        
Goodwill, beginning balance   13,575,000 13,575,000  
Acquired goodwill     0  
Goodwill adjustments     0  
Goodwill impairment     0  
Goodwill, disposal from sale of business   0    
Foreign currency adjustment   0 0  
Goodwill, ending balance   13,575,000 13,575,000 13,575,000
Goodwill   13,575,000 13,575,000 $ 13,575,000
Other reporting unit        
Goodwill [Roll Forward]        
Goodwill, beginning balance   0    
Goodwill, ending balance   0 0  
Goodwill   $ 0 $ 0