Segment Reporting and Geographic Information  - Revenue from External Customers by Products and Services (Details) - USD ($) $ in Thousands  | 
3 Months Ended | ||||
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Sep. 30, 2016  | 
Sep. 30, 2015  | 
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| Revenue from External Customer | |||||
| Revenues | $ 750,673 | $ 642,644 | |||
| Segment percent of total revenues (as a percent) | 100.00% | 100.00% | |||
| Wafer Inspection | |||||
| Revenue from External Customer | |||||
| Revenues | $ 359,009 | $ 227,783 | |||
| Segment percent of total revenues (as a percent) | 48.00% | 35.00% | |||
| Patterning | |||||
| Revenue from External Customer | |||||
| Revenues | $ 172,614 | $ 198,085 | |||
| Segment percent of total revenues (as a percent) | 23.00% | 31.00% | |||
| Global Service and Support | |||||
| Revenue from External Customer | |||||
| Revenues | [1] | $ 203,130 | $ 199,871 | ||
| Segment percent of total revenues (as a percent) | [1] | 27.00% | 31.00% | ||
| Other | |||||
| Revenue from External Customer | |||||
| Revenues | $ 15,920 | $ 16,905 | |||
| Segment percent of total revenues (as a percent) | 2.00% | 3.00% | |||
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- Definition Segment Percent Of Total Revenue No definition available. 
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available. 
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- Definition Total revenue from sale of goods and services rendered during the reporting period, in the normal course of business, reduced by sales returns and allowances, and sales discounts. Reference 1: http://www.xbrl.org/2003/role/presentationRef 
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