| Goodwill and Purchased Intangible Assets  - Schedule of Goodwill (Details) $ in Thousands | 3 Months Ended | 
|---|---|
| Sep. 30, 2018  USD ($)  reporting_unit | |
| Goodwill | |
| Number of reporting units | reporting_unit | 4 | 
| Goodwill | |
| Balance as of June 30, 2018 | $ 354,698 | 
| Acquired goodwill | 5,807 | 
| Foreign currency and other adjustments | (77) | 
| Balance as of September 30, 2018 | 360,428 | 
| Wafer Inspection | |
| Goodwill | |
| Balance as of June 30, 2018 | 281,005 | 
| Acquired goodwill | 0 | 
| Foreign currency and other adjustments | (77) | 
| Balance as of September 30, 2018 | 280,928 | 
| Patterning | |
| Goodwill | |
| Balance as of June 30, 2018 | 53,255 | 
| Acquired goodwill | 0 | 
| Foreign currency and other adjustments | 0 | 
| Balance as of September 30, 2018 | 53,255 | 
| GSS | |
| Goodwill | |
| Balance as of June 30, 2018 | 8,039 | 
| Acquired goodwill | 4,631 | 
| Foreign currency and other adjustments | 0 | 
| Balance as of September 30, 2018 | 12,670 | 
| Others | |
| Goodwill | |
| Balance as of June 30, 2018 | 12,399 | 
| Acquired goodwill | 1,176 | 
| Foreign currency and other adjustments | 0 | 
| Balance as of September 30, 2018 | $ 13,575 | 
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- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available. 
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- Definition A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period. No definition available. 
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- Definition Amount of increase (decrease) from foreign currency translation adjustments and purchase accounting adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition Number of reporting units tested for impairment of goodwill. A reporting unit is an operating segment or one level below an operating segment. No definition available. 
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