Quarterly report pursuant to Section 13 or 15(d)

BUSINESS COMBINATIONS (Details)

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BUSINESS COMBINATIONS (Details) - USD ($)
$ in Thousands
3 Months Ended
Sep. 17, 2021
Jul. 01, 2021
Sep. 30, 2021
Jun. 30, 2021
Business Acquisition        
Contingent consideration     $ 21,300  
Goodwill     2,041,338 $ 2,011,172
Acquired goodwill     30,164  
Contingent consideration liability, current     1,500  
Contingent consideration liability, non-current     19,800  
Wafer Inspection and Patterning        
Business Acquisition        
Goodwill     447,026 $ 416,860
Acquired goodwill     30,164  
September 2021 acquisition        
Business Acquisition        
Total purchase consideration $ 460,000      
July 2021 acquisition        
Business Acquisition        
Total purchase consideration   $ 80,300    
Additional consideration (up to)   35,000    
Contingent consideration     $ 12,800  
Identifiable intangible assets   31,700    
Net tangible assets   26,400    
Deferred tax liabilities   8,000    
Goodwill   30,200    
July 2021 acquisition | Wafer Inspection and Patterning        
Business Acquisition        
Acquired goodwill   $ 30,200