| Segment Reporting and Geographic Information (Tables)
 | 9 Months Ended | 
      
        | Mar. 31, 2014 | 
      
        | Segment Reporting [Abstract] |  | 
      
        | Revenues by Geographic Region | 
The following is a summary of revenues by geographic region, based on ship-to location, for the indicated periods (as a percentage of total revenues): 
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 | Three months ended March 31, |   | Nine months ended March 31, |  
| (Dollar amounts in thousands) | 2014 |   | 2013 |   | 2014 |   | 2013 |  
| Revenues: |   |   |   |   |   |   |   |   |   |   |   |   |   |   |   |  
| North America | $ | 176,560 | 
 |   | 21 | % |   | $ | 268,889 | 
 |   | 38 | % |   | $ | 504,188 | 
 |   | 23 | % |   | $ | 588,505 | 
 |   | 28 | % |  
| Taiwan | 242,631 | 
 |   | 29 | % |   | 227,535 | 
 |   | 31 | % |   | 508,747 | 
 |   | 23 | % |   | 727,328 | 
 |   | 34 | % |  
| Japan | 99,887 | 
 |   | 12 | % |   | 61,154 | 
 |   | 8 | % |   | 245,522 | 
 |   | 11 | % |   | 242,718 | 
 |   | 11 | % |  
| Europe & Israel | 45,722 | 
 |   | 6 | % |   | 54,659 | 
 |   | 7 | % |   | 237,504 | 
 |   | 11 | % |   | 173,572 | 
 |   | 8 | % |  
| Korea | 80,454 | 
 |   | 10 | % |   | 80,252 | 
 |   | 11 | % |   | 310,481 | 
 |   | 14 | % |   | 207,758 | 
 |   | 10 | % |  
| Rest of Asia | 186,345 | 
 |   | 22 | % |   | 36,540 | 
 |   | 5 | % |   | 388,623 | 
 |   | 18 | % |   | 182,868 | 
 |   | 9 | % |  
| Total | $ | 831,599 | 
 |   | 100 | % |   | $ | 729,029 | 
 |   | 100 | % |   | $ | 2,195,065 | 
 |   | 100 | % |   | $ | 2,122,749 | 
 |   | 100 | % |  | 
      
        | Revenues by Major Products | 
The following is a summary of revenues by major products for the indicated periods (as a percentage of total revenues): 
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 | Three months ended March 31, |   | Nine months ended March 31, |  
| (Dollar amounts in thousands) | 2014 |   | 2013 |   | 2014 |   | 2013 |  
| Revenues: |   |   |   |   |   |   |   |   |   |   |   |   |   |   |   |  
| Defect inspection | $ | 497,918 | 
 |   | 60 | % |   | $ | 427,832 | 
 |   | 59 | % |   | $ | 1,235,783 | 
 |   | 56 | % |   | $ | 1,184,016 | 
 |   | 55 | % |  
| Metrology | 159,662 | 
 |   | 19 | % |   | 135,406 | 
 |   | 19 | % |   | 422,656 | 
 |   | 19 | % |   | 394,489 | 
 |   | 19 | % |  
| Service | 161,516 | 
 |   | 19 | % |   | 149,282 | 
 |   | 20 | % |   | 479,059 | 
 |   | 22 | % |   | 445,902 | 
 |   | 21 | % |  
| Other | 12,503 | 
 |   | 2 | % |   | 16,509 | 
 |   | 2 | % |   | 57,567 | 
 |   | 3 | % |   | 98,342 | 
 |   | 5 | % |  
| Total | $ | 831,599 | 
 |   | 100 | % |   | $ | 729,029 | 
 |   | 100 | % |   | $ | 2,195,065 | 
 |   | 100 | % |   | $ | 2,122,749 | 
 |   | 100 | % |  | 
      
        | Long-Lived Assets by Geographic Region | 
Long-lived assets by geographic region as of the dates indicated below were as follows: 
 
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| (In thousands) | As of March 31, 2014
 |   | As of June 30, 2013
 |  
| Long-lived assets: |   |   |   |  
| United States | $ | 222,082 | 
 |   | $ | 215,136 | 
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| Europe | 40,921 | 
 |   | 49,556 | 
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| Israel | 33,632 | 
 |   | 28,374 | 
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| Singapore | 49,284 | 
 |   | 44,957 | 
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| Rest of Asia | 19,768 | 
 |   | 9,736 | 
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| Total | $ | 365,687 | 
 |   | $ | 347,759 | 
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