Annual report pursuant to Section 13 and 15(d)

Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)

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Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)
$ in Thousands
 12 Months Ended
Jun. 30, 2018
USD ($)
reporting_unit
Jun. 30, 2017
USD ($)
Jun. 30, 2016
USD ($)
Goodwill      
Number of reporting units | reporting_unit 4    
Goodwill      
Goodwill, beginning balance $ 349,526 $ 335,177  
Acquired goodwill 5,163 14,280  
Foreign currency adjustment 9 69  
Goodwill, ending balance 354,698 349,526  
Accumulated impairment loss 277,600 277,600 $ 277,600
Wafer Inspection      
Goodwill      
Goodwill, beginning balance 281,095 281,026  
Acquired goodwill 0 0  
Foreign currency adjustment (90) 69  
Goodwill, ending balance 281,005 281,095  
Patterning      
Goodwill      
Goodwill, beginning balance 53,255 53,255  
Acquired goodwill 0 0  
Foreign currency adjustment 0 0  
Goodwill, ending balance 53,255 53,255  
GSS      
Goodwill      
Goodwill, beginning balance 2,856 0  
Acquired goodwill 5,163 2,856  
Foreign currency adjustment 20 0  
Goodwill, ending balance 8,039 2,856  
Others      
Goodwill      
Goodwill, beginning balance 12,320 896  
Acquired goodwill 0 11,424  
Foreign currency adjustment 79 0  
Goodwill, ending balance $ 12,399 $ 12,320