Quarterly report pursuant to Section 13 or 15(d)

Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)

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Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)
$ in Thousands
 3 Months Ended
Sep. 30, 2016
USD ($)
reporting_unit
Jun. 30, 2014
USD ($)
Goodwill    
Number of reporting units | reporting_unit 4  
Goodwill    
Balance as of June 30, 2016 $ 335,177  
Goodwill adjustment 21  
Balance as of September 30, 2016 335,198  
Accumulated impairment loss   $ 277,600
Wafer Inspection    
Goodwill    
Balance as of June 30, 2016 281,026  
Goodwill adjustment 21  
Balance as of September 30, 2016 281,047  
Patterning    
Goodwill    
Balance as of June 30, 2016 53,255  
Goodwill adjustment 0  
Balance as of September 30, 2016 53,255  
Others    
Goodwill    
Balance as of June 30, 2016 896  
Goodwill adjustment 0  
Balance as of September 30, 2016 $ 896