KLA-Tencor's TeraScanHR System in 45nm Production at Toppan Printing

SAN JOSE, Calif.--(BUSINESS WIRE)--

KLA-Tencor, Inc. (NASDAQ:KLAC), the global leader in photomask inspection technology, announced that Toppan Printing Co., Ltd. has installed the TeraScanHR mask inspection system in its most advanced production line for 45nm-generation photomasks, following a highly successful beta testing period.

Introduced in March 2007, the TeraScanHR system is the industry's first production-capable 45nm-generation photomask inspection system. The system features exceptional resolution capable of capturing the small defects and extremely complex OPC (optical proximity correction) at the 45nm node, resulting in the highest sensitivity for critical layer photomask production. The new system offers customers a broad range of pixel sizes that make the system capable across several chip generations, from 130nm to 45nm and beyond.

Akihiro Nagata, senior managing director and head of Semiconductor Solutions Division of Toppan Printing Co., Ltd., said, "Establishing inspection technology is one of the highest priority issues in developing and manufacturing leading-edge photomasks. This joint work between KLA-Tencor, the technology leader in photomask inspection solutions, and Toppan Printing, the biggest photomask supplier in the world, is nothing short of ideal. By combining each company's sophisticated technologies, I believe that we can supply our chipmaker customers with advanced photomasks that contribute to improving efficiency of the most advanced IC development and production."

"Our collaboration with Toppan during the first customer beta evaluation of the TeraScanHR system was extremely valuable, not only because of Toppan's technical expertise as one of the world's most advanced mask manufacturers, but because of its access to a wide range of mask types and device designs," said Harold Lehon, vice president and general manager of KLA-Tencor's Reticle and Photomask Inspection Division. "Having Toppan validate the advancements made in the TeraScanHR system in a very demanding real-world maskmaking environment proves the effectiveness of our technology for 45nm and below mask generations."

About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. Headquartered in San Jose, California, the Company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the NASDAQ Global Select Market under the symbol KLAC. Additional information about the Company is available at http://www.kla-tencor.com.

Source: KLA-Tencor, Inc.

Released April 15, 2007