Annual report pursuant to Section 13 and 15(d)

BUSINESS COMBINATIONS AND DISPOSITIONS - Fiscal 2020 Acquisitions (Details)

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BUSINESS COMBINATIONS AND DISPOSITIONS - Fiscal 2020 Acquisitions (Details) - USD ($)
 12 Months Ended
Apr. 24, 2020
Aug. 22, 2019
Jun. 30, 2022
Business Acquisition [Line Items]      
Acquired goodwill     $ 308,952,000
Contingent consideration, non-current     6,500,000
Privately-held company acquired on August 22, 2019      
Business Acquisition [Line Items]      
Total purchase consideration   $ 94,000,000  
Measurement period adjustment   200,000  
Contingent consideration (up to)   60,000,000  
Contingent consideration, non-current     0
Wafer Inspection and Patterning Reporting Unit      
Business Acquisition [Line Items]      
Acquired goodwill     $ 308,952,000
Wafer Inspection and Patterning Reporting Unit | Privately-held company acquired on August 22, 2019      
Business Acquisition [Line Items]      
Acquired goodwill   $ 54,200,000  
Product Line Acquired On April 24, 2020      
Business Acquisition [Line Items]      
Purchase consideration to acquire product line $ 11,400,000    
Product Line Acquired On April 24, 2020 | Wafer Inspection and Patterning Reporting Unit      
Business Acquisition [Line Items]      
Acquired goodwill $ 2,200,000