Quarterly report pursuant to Section 13 or 15(d)

Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)

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Goodwill and Purchased Intangible Assets - Schedule of Goodwill (Details)
$ in Thousands
 9 Months Ended
Mar. 31, 2018
USD ($)
reporting_unit
Jun. 30, 2017
USD ($)
Goodwill    
Number of reporting units | reporting_unit 4  
Goodwill    
Balance as of June 30, 2017 $ 349,526  
Foreign currency and other adjustments 472  
Balance as of March 31, 2018 349,998  
Accumulated impairment loss 277,600 $ 277,600
Wafer Inspection    
Goodwill    
Balance as of June 30, 2017 281,095  
Foreign currency and other adjustments (12)  
Balance as of March 31, 2018 281,083  
Patterning    
Goodwill    
Balance as of June 30, 2017 53,255  
Foreign currency and other adjustments 0  
Balance as of March 31, 2018 53,255  
GSS    
Goodwill    
Balance as of June 30, 2017 2,856  
Foreign currency and other adjustments 97  
Balance as of March 31, 2018 2,953  
Others    
Goodwill    
Balance as of June 30, 2017 12,320  
Foreign currency and other adjustments 387  
Balance as of March 31, 2018 $ 12,707