Goodwill and Purchased Intangible Assets - Goodwill Balance by Reporting Unit (Details) $ in Thousands |
12 Months Ended | |||||||||
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Jun. 30, 2016
USD ($)
reporting_unit
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Jun. 30, 2015
USD ($)
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| Goodwill [Line Items] | ||||||||||
| Number of reporting units | reporting_unit | 4 | |||||||||
| Goodwill [Roll Forward] | ||||||||||
| Beginning balance | $ 335,263 | $ 335,355 | ||||||||
| Goodwill allocation | 0 | |||||||||
| Goodwill adjustment | (86) | (92) | ||||||||
| Ending balance | 335,177 | 335,263 | ||||||||
| Others | ||||||||||
| Goodwill [Roll Forward] | ||||||||||
| Beginning balance | 0 | |||||||||
| Goodwill allocation | [1] | 896 | ||||||||
| Goodwill adjustment | 0 | |||||||||
| Ending balance | 896 | 0 | ||||||||
| Operating Segments | Wafer Inspection | ||||||||||
| Goodwill [Roll Forward] | ||||||||||
| Beginning balance | [2] | 332,783 | ||||||||
| Goodwill allocation | [1] | (51,671) | ||||||||
| Goodwill adjustment | (86) | |||||||||
| Ending balance | 281,026 | 332,783 | [2] | |||||||
| Operating Segments | Patterning | ||||||||||
| Goodwill [Roll Forward] | ||||||||||
| Beginning balance | [3] | 2,480 | ||||||||
| Goodwill allocation | [1] | 50,775 | ||||||||
| Goodwill adjustment | 0 | |||||||||
| Ending balance | $ 53,255 | $ 2,480 | [3] | |||||||
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| X | ||||||||||
- Definition Amount after accumulated impairment loss of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available.
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| X | ||||||||||
- Definition A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period. No definition available.
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| X | ||||||||||
- Definition Amount of transfers into (out of) an asset representing the future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
- Definition Amount of increase (decrease) from foreign currency translation adjustments and purchase accounting adjustments of an asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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| X | ||||||||||
- Definition Number of reporting units tested for impairment of goodwill. A reporting unit is an operating segment or one level below an operating segment. Reference 1: http://www.xbrl.org/2003/role/presentationRef
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