Sep 04, 2008 4:30 pm EDT KLA-Tencor Introduces New Surfscan SP2XP Monitor-Wafer Defect Inspection System for IC Fabs
Jul 14, 2008 4:30 pm EDT KLA-Tencor Introduces New P-6 Surface Profiler System for Scientific and Solar Metrology
Jul 10, 2008 4:30 pm EDT KLA-Tencor Launches First Computational Lithography Tool To Address Double-Patterning Challenges
Jul 08, 2008 4:30 pm EDT KLA-Tencor Introduces 10th Generation E-beam Inspection System, Enabling 4Xnm and 3Xnm Production