Jul 11, 2007 6:00 am EDT KLA-Tencor Extends Inspection Tools Into the Metrology Realm With New SURFmonitor System
Jul 09, 2007 6:00 am EDT KLA-Tencor Drives Semiconductor Profiling Technology to 45nm with New HRP-350 System
Jul 03, 2007 6:00 am EDT KLA-Tencor Completes Its 45nm Defect Portfolio With New Generation Defect Review and Classification System
Jun 26, 2007 6:00 am EDT KLA-Tencor Boosts 45nm Defect Capture, Doubles Throughput with New Memory- and Logic-Specific Brightfield Inspection Systems
Jun 19, 2007 6:00 am EDT KLA-Tencor Extends Industry's Darkfield Inspection Benchmark With New Puma 9150 Inspection System
May 30, 2007 7:00 am EDT KLA-Tencor's New LithoWare Tool Gives Designers Advanced RET/OPC Capabilities That Save Design Time, Reduce Time-to-Production
