Quarterly report pursuant to Section 13 or 15(d)

Business Combinations - Fiscal 2020 Acquisitions Additional Information (Details)

v3.20.1
Business Combinations - Fiscal 2020 Acquisitions Additional Information (Details) - USD ($)
9 Months Ended
Aug. 22, 2019
Mar. 31, 2020
Business Acquisition    
Acquired goodwill   $ 54,001,000
Wafer Inspection and Patterning    
Business Acquisition    
Acquired goodwill   54,001,000
Privately-held company    
Business Acquisition    
Total purchase consideration $ 93,900,000  
Additional consideration (up to) 60,000,000.0  
Contingent consideration, non-current   9,700,000
Goodwill deductible for income tax purposes $ 0  
Privately-held company | Wafer Inspection and Patterning    
Business Acquisition    
Acquired goodwill   $ 54,000,000.0