Annual report pursuant to Section 13 and 15(d)

GOODWILL AND PURCHASED INTANGIBLE ASSETS - Schedule of Goodwill (Details)

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GOODWILL AND PURCHASED INTANGIBLE ASSETS - Schedule of Goodwill (Details) - USD ($)
12 Months Ended
Jun. 30, 2023
Jun. 30, 2022
Goodwill [Roll Forward]    
Goodwill, beginning balance $ 2,320,049,000 $ 2,011,172,000
Acquired goodwill 6,776,000 308,952,000
Goodwill, disposal from sale of business (42,622,000)  
Goodwill adjustments (5,337,000)  
Foreign currency adjustment (46,000) (75,000)
Goodwill, ending balance 2,278,820,000 2,320,049,000
Goodwill 2,278,820,000 2,320,049,000
Wafer Inspection and Patterning    
Goodwill [Roll Forward]    
Goodwill, beginning balance 725,737,000 416,860,000
Acquired goodwill 6,776,000 308,952,000
Goodwill, disposal from sale of business 0  
Goodwill adjustments (5,337,000)  
Foreign currency adjustment (46,000) (75,000)
Goodwill, ending balance 727,130,000 725,737,000
Goodwill 727,130,000 725,737,000
Global Service and Support (“GSS”)    
Goodwill [Roll Forward]    
Goodwill, beginning balance 25,908,000 25,908,000
Acquired goodwill 0 0
Goodwill, disposal from sale of business 0  
Goodwill adjustments 0  
Foreign currency adjustment 0 0
Goodwill, ending balance 25,908,000 25,908,000
Goodwill 25,908,000 25,908,000
Specialty Semiconductor Process    
Goodwill [Roll Forward]    
Goodwill, beginning balance 681,858,000 681,858,000
Acquired goodwill 0 0
Goodwill, disposal from sale of business 0  
Goodwill adjustments 0  
Foreign currency adjustment 0 0
Goodwill, ending balance 681,858,000 681,858,000
Goodwill 681,858,000 681,858,000
PCB and Display    
Goodwill [Roll Forward]    
Goodwill, beginning balance 872,971,000 872,971,000
Acquired goodwill 0 0
Goodwill, disposal from sale of business (42,622,000)  
Goodwill adjustments 0  
Foreign currency adjustment 0 0
Goodwill, ending balance 830,349,000 872,971,000
Goodwill 830,349,000 872,971,000
Component Inspection    
Goodwill [Roll Forward]    
Goodwill, beginning balance 13,575,000 13,575,000
Acquired goodwill 0 0
Goodwill, disposal from sale of business 0  
Goodwill adjustments 0  
Foreign currency adjustment 0 0
Goodwill, ending balance 13,575,000 13,575,000
Goodwill 13,575,000 13,575,000
Other reporting unit    
Goodwill [Roll Forward]    
Goodwill, beginning balance $ 0  
Goodwill, ending balance   0
Goodwill   $ 0