Quarterly report pursuant to Section 13 or 15(d)

BUSINESS COMBINATIONS (Details)

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BUSINESS COMBINATIONS (Details) - USD ($)
Apr. 24, 2020
Aug. 22, 2019
Mar. 31, 2021
April 2020 acquisition      
Business Acquisition      
Total purchase consideration $ 11,400,000    
Acquired goodwill $ 2,200,000    
August 2019 acquisition      
Business Acquisition      
Total purchase consideration   $ 94,000,000.0  
Additional consideration (up to)   60,000,000.0  
Contingent consideration     $ 0
August 2019 acquisition | Wafer Inspection and Patterning      
Business Acquisition      
Acquired goodwill   $ 54,200,000  
Other 2019 acquisitions      
Business Acquisition      
Contingent consideration     7,400,000
Contingent consideration liability, current     600,000
Contingent consideration liability, non-current     $ 6,800,000