| Goodwill and Purchased Intangible Assets (Tables)
 | 9 Months Ended | 
| Mar. 31, 2020 | 
|---|
| Goodwill and Intangible Assets Disclosure [Abstract] |  | 
| Goodwill Balances | The following table presents goodwill carrying value and the movements during the nine months ended March 31, 2020(1): 
|  |  
|  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  
| (In thousands) |   | Wafer Inspection and Patterning |   | 
Global Service and Support (“GSS”)
 |   | Specialty Semiconductor Process |   | PCB and Display |   | Component Inspection |   | Total |  
| Balance as of June 30, 2019 |   | $ | 360,615 | 
 |   | $ | 25,908 | 
 |   | $ | 821,842 | 
 |   | $ | 989,918 | 
 |   | $ | 13,575 | 
 |   | $ | 2,211,858 | 
 |  
| Acquired goodwill |   | 54,001 | 
 |   | — | 
 |   | — | 
 |   | — | 
 |   | — | 
 |   | 54,001 | 
 |  
| Goodwill adjustments |   | 70 | 
 |   | — | 
 |   | 4,195 | 
 |   | 29,773 | 
 |   | — | 
 |   | 34,038 | 
 |  
| Goodwill impairment |   | — | 
 |   | — | 
 |   | (144,179 | ) |   | (112,470 | ) |   | — | 
 |   | (256,649 | ) |  
| Foreign currency adjustments |   | (119 | ) |   | — | 
 |   | — | 
 |   | — | 
 |   | — | 
 |   | (119 | ) |  
| Balance as of March 31, 2020 |   | $ | 414,567 | 
 |   | $ | 25,908 | 
 |   | $ | 681,858 | 
 |   | $ | 907,221 | 
 |   | $ | 13,575 | 
 |   | $ | 2,043,129 | 
 | 
 _________________ (1) 
No goodwill was assigned to the Other reporting unit, and accordingly was excluded in the table above. 
 | 
| Components of Purchased Intangible Assets | The components of purchased intangible assets as of the dates indicated below were as follows: 
|  |  
|  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  
| (In thousands) |   |   | As ofMarch 31, 2020
 |   | As ofJune 30, 2019
 |  
| Category | Range of Useful  Lives (in years) |   | Gross Carrying Amount |   | Accumulated Amortization,   and Impairment |   | Net Amount |   | Gross Carrying Amount |   | Accumulated Amortization and Impairment |   | Net Amount |  
| Existing technology | 4-8 |   | $ | 1,266,088 | 
 |   | $ | 305,640 | 
 |   | $ | 960,448 | 
 |   | $ | 1,224,629 | 
 |   | $ | 196,582 | 
 |   | $ | 1,028,047 | 
 |  
| Customer relationships | 4-9 |   | 305,017 | 
 |   | 90,606 | 
 |   | 214,411 | 
 |   | 297,250 | 
 |   | 66,471 | 
 |   | 230,779 | 
 |  
| Trade name / Trademark | 4-7 |   | 117,133 | 
 |   | 35,650 | 
 |   | 81,483 | 
 |   | 114,573 | 
 |   | 25,052 | 
 |   | 89,521 | 
 |  
| Backlog and other | <1-9 |   | 50,403 | 
 |   | 44,636 | 
 |   | 5,767 | 
 |   | 43,969 | 
 |   | 19,146 | 
 |   | 24,823 | 
 |  
| Intangible assets subject to amortization |   |   | 1,738,641 | 
 |   | 476,532 | 
 |   | 1,262,109 | 
 |   | 1,680,421 | 
 |   | 307,251 | 
 |   | 1,373,170 | 
 |  
| In-process research and development |   |   | 175,835 | 
 |   | 100 | 
 |   | 175,735 | 
 |   | 187,500 | 
 |   | — | 
 |   | 187,500 | 
 |  
| Total |   |   | $ | 1,914,476 | 
 |   | $ | 476,632 | 
 |   | $ | 1,437,844 | 
 |   | $ | 1,867,921 | 
 |   | $ | 307,251 | 
 |   | $ | 1,560,670 | 
 | 
 | 
| Amortization Expense for Purchased Intangible Assets | 
Amortization expense for purchased intangible assets for the periods indicated below was as follows: 
|  |  
|  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  |  
|   | Three Months EndedMarch 31,
 |   | Nine Months EndedMarch 31,
 |  
| (In thousands) | 2020 |   | 2019 |   | 2020 |   | 2019 |  
| Amortization expense - Cost of revenues | $ | 36,850 | 
 |   | $ | 15,770 | 
 |   | $ | 108,835 | 
 |   | $ | 17,628 | 
 |  
| Amortization expense - Selling, general and administrative | 17,724 | 
 |   | 10,086 | 
 |   | 60,237 | 
 |   | 10,973 | 
 |  
| Amortization expense - Research and development | 31 | 
 |   | 12 | 
 |   | 193 | 
 |   | 12 | 
 |  
| Total  | $ | 54,605 | 
 |   | $ | 25,868 | 
 |   | $ | 169,265 | 
 |   | $ | 28,613 | 
 | 
 | 
| Remaining Estimated Amortization Expense | 
Based on the purchased intangible assets gross carrying amount recorded as of March 31, 2020, the underlying assets, the remaining estimated annual amortization expense is expected to be as follows:
 
|  |  
|  |  |  |  |  
| Fiscal year ending June 30: | Amortization (In thousands) |  
| 2020 (remaining three months) | $ | 51,137 | 
 |  
| 2021 | 196,847 | 
 |  
| 2022 | 194,269 | 
 |  
| 2023 | 193,177 | 
 |  
| 2024 | 190,660 | 
 |  
| 2025 and thereafter | 436,019 | 
 |  
| Total | $ | 1,262,109 | 
 | 
 |