| Business Combinations  - Fiscal 2020 Acquisitions Additional Information (Details) - USD ($) | 9 Months Ended | |
|---|---|---|
| Aug. 22, 2019 | Mar. 31, 2020 | |
| Business Acquisition | ||
| Acquired goodwill | $ 54,001,000 | |
| Wafer Inspection and Patterning | ||
| Business Acquisition | ||
| Acquired goodwill | 54,001,000 | |
| Privately-held company | ||
| Business Acquisition | ||
| Total purchase consideration | $ 93,900,000 | |
| Additional consideration (up to) | 60,000,000.0 | |
| Contingent consideration, non-current | 9,700,000 | |
| Goodwill deductible for income tax purposes | $ 0 | |
| Privately-held company | Wafer Inspection and Patterning | ||
| Business Acquisition | ||
| Acquired goodwill | $ 54,000,000.0 | 
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- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. No definition available. 
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- Definition The amount of goodwill arising from a business combination that is expected to be deductible for tax purposes. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition Amount of consideration transferred, consisting of acquisition-date fair value of assets transferred by the acquirer, liabilities incurred by the acquirer, and equity interest issued by the acquirer. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition For contingent consideration arrangements recognized in connection with a business combination, this element represents an estimate of the high-end of the potential range (undiscounted) of the consideration which may be paid. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition Amount of liability recognized arising from contingent consideration in a business combination, expected to be settled beyond one year or the normal operating cycle, if longer. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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- Definition Amount of increase in asset representing future economic benefits arising from other assets acquired in a business combination that are not individually identified and separately recognized resulting from a business combination. Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef 
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